Micro-XRF provides a versatile tool for fast analysis of NiP and Au dual-layer plating thickness on circuit boards without requiring sample preparation. The high spatial resolution capability of the XGT-9000 microscope enables characterisation of coatings on features with dimensions below 1 mm (and as small as 10 µm). In this note we show that 49 nm Au and 2.5 µm NiP layers are accurately and reproducibly measured with a 100 µm micro-spot.
